Spectroscopic ellipsometry measurement data obtained from the porous anodized aluminum oxide (PAAO). The sample was made by anodization of aluminum polycrystal in 0.3 mol/L oxalic acid at 40 V for 4 minutes and 35 seconds. The measurements were carried out at 20 × 20 locations covering all of the sample surface (approximately 4.8 × 4.8 mm2). The coordinates of each of 400 locations are available in "mapping_points.csv" file. All measurement data is also included in a single "AJ-7-03-31 Ellipsometry Mapping Measurements.rar" file. Ellipsometer: rotating compensator GES5-E (Semilab). Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum. Detector: UV-Vis CCD with 0.8 nm resolution. Spectral range: approximately 230-960 nm. Light incidence angles: 50°, 55°, 60°, 65°, 70°, 75°. Light beam size: microspot (365 × 470 μm2 at 75° angle of incidence). The same sample was also measured using the same spectroscopic ellipsometry method after being covered with hydrogenated amorphous diamond-like carbon and silver nanocomposite. The data can be found here: https://doi.org/10.5281/zenodo.7257907

The research was carried out under postdoctoral project "Patterned hybrid multilayer films for optical sensors", No. 1.1.1.2/VIAA/4/20/615.