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Other ORP type . 2022
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Other ORP type . 2022
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https://doi.org/10.5281/zenodo...
Other ORP type . 2022
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StretchBio_D.3.1_Guidelines for optimized semiconductor fabrication route

appsOther research productkeyboard_double_arrow_right Other ORP type 30 May 2022Publisher:ZenodoFunded by:EC | StretchBio
Authors: Lopez, E; Bertelsen, C; HERNANDEZ-RAMIREZ, F; ROMANO-RODRIGUEZ, A;

doi: 10.5281/zenodo.7015228 , 10.5281/zenodo.7015227

StretchBio_D.3.1_Guidelines for optimized semiconductor fabrication route

Abstract

This deliverable presents the results of the cleanroom fabrication work performed in the initial phase of the StretchBio project. Pillars with various pitches, diameters and heights have been fabricated. These results show that the required nanostructures can be fabricated with the desired dimensions and forms the basis of delivery of the sample to consortium partners going forward in the project.

Keywords

Fabrication, nanopillars, cleanroom

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
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popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
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