Data of figure 11 includes: (11a.csv) Simulated temperature distribution plot with an incident power P = 64.39 μW; (11b.csv) thermomechanical noise spectra measured at a temperature of 5 K for different laser powers. The x-axis is the difference in frequency from the resonance frequency measured with a laser power of 64.39 μW, equal to 1.331 MHz. (11c.csv) measured resonance frequency difference versus laser power with respect to the resonance frequency acquired with a laser power of 64.39 μW; (11d.csv) temperature extracted from the measurements in (11b.csv) by integrating the area under the peak versus laser power.