This data publication contains the results of microcantilever fatigue tests on a metallic glass and tungsten. It supplements the publication “A new method for microscale cyclic crack growth characterization from notched microcantilevers and application to single crystalline tungsten and a metallic glass” DOI: 10.1557/s43578-022-00618-x. During the experiments four Zr48Cu36Ag8Al8 metallic glass microcantilevers and five tungsten single crystal microcantilevers were tested. The compositions, orientations and the production of the microcantilevers are described in the publication. The fatigue tests were performed by S. Gabel under the supervision of B. Merle at the Institute I - General Materials Properties of the Friedrich-Alexander Universität Erlangen-Nürnberg (Martensstr.5, 91058 Erlangen, Germany) using a NMT 03 in-situ nanoindenter (FemtoTools, Switzerland) inside a 1540EsB Secondary Electron Microscope (Carl Zeiss, Germany). The indenter was equipped with a wedge diamond tip, which had a length of ~10 µm. The experiments were performed, until the tip lost contact with the microcantilever due to bending. The data for the fatigue tests are provided in nine .csv files, each corresponding to a single test and being divided into two folders, sorted by the material. The numbers in the files names describe the initial cyclic stress intensity factor ΔKI. This is also used in the publication to describe the single tests. The data in each .csv file are organized as follows: Each row contains thirteen semicolon separated characters, forming thirteen columns. The data description are given in row 1, e.g., "Stiffness". The physical unit is given in row 2, e.g., "N/m". From row 3 on the data for the individual experiment are given. The following information can be found in the respective columns: 1: Cycle number. 2: Mean force Pm in µN. 3: Force amplitude ΔP/2 in µN. 4: Displacement amplitude Δh/2 in µm. 5: Stiffness SCSM in N/m. 6: Crack growth length Δa in µm. 7: Stress intensity factor range ΔKI in MPa√m. 8: Initial crack length a in µm. 9: Cantilever width W in µm. 10: Cantilever thickness T in µm. 11: Span length L in µm. 12: Phase shift in °. 13: Temperature in °C. One test with metallic glass was performed with a higher recording rate of 400 Hz, which can be found in the folder: "Metallic_Glass_High_Recording_Rate". The data in the .csv file are sorted differently to the other tests: Each row contains fifteen semicolon separated characters, forming fifteen columns The data description is given in row 1, e.g., "Stiffness". The physical unit is given in row 2, e.g., "N/m". From row 3 on the data for the individual experiment are given. The following information can be found in the respective columns: 1: Time in s. 2: Cycle number. 3: Mean displacement hm in µm. 4: Mean force Pm in µN. 5: Force amplitude ΔP/2 in µN. 6: Displacement amplitude Δh/2 in µm. 7: The force P in µN. 8: Displacement h in µm. 9: Stiffness SCSM in N/m. 10: Initial crack length a in µm. 11: Cantilever width W in µm. 12: Cantilever thickness T in µm. 13: Span length L in µm. 14: Phase shift in °. 15: Temperature in °C.

This project has received funding from the European Research Council (ERC) under the European Union's Horizon 2020 research and innovation programme (microKIc, Grant agreement No. 725483 and NanoHighSpeed, Grant agreement No. 949626). This research used resources from the Center for Nanoanalysis and Electron Microscopy (CENEM) and the Interdisciplinary Center for Nanostructured Films (IZNF) at Friedrich-Alexander Universität Erlangen-Nürnberg (FAU).