These original measurement data relate to the publication: J. Schaude, A. C. Gröschl, T. Hausotte: Effect of a Misidentified Centre of a Type ASG Material Measure on the Determined Topographic Spatial Resolution of an Optical Point Sensor, Metrology 2(1), p. 19-32, 2022, https://doi.org/10.3390/metrology2010002. Please refer to this open access publication for a detailed description of the measurement setup and procedure. All data are in ASCII-format. Each file contains four columns, where column one to three are the x, y, and z-coordinates of the positioning system and column four is the signal of the photodetector. Content of the folders 10_Plane: Axial probings on 18 points just outside the grooves. 20_Edges: Lateral probings from each point just outside the grooves in the direction of the roughly determined centre of the material measure. 30_PlaneArea: Repeated axial probing on a plane area near the material measure. 40_RadialMeasurement: Radial measurement of the material measure by lateral (radial) probings conducted on different heights (referring to the distance to the plane fitted to the measuring points of 10_Plane), and radii (referring to the centre of the circle fitted to the edges determined in 20_Edges). Each radial probing has its own data file, with the name of the data file being “radial_probing {radius in m} {height in m} {data and time of probing}.txt”. 50_LineMeasurement: Lateral probings conducted on different heights (referring to the distance to the plane fitted to the measuring points of 10_Plane), different lateral offsets (referring to the centre of the circle fitted to the edges determined in 20_Edges) and on two angles (on the groove (0°) and the adjacent top level (10°)). Please refer to sec. 5.2 of the aforementioned publication for a detailed description. Each lateral probing has its own data file, with the name of the file being “lateral probing {angle in °} {offset in m} {height in m} {data and time of probing}.txt”. Acknowledgement This project 20IND07 TracOptic has received funding from the EMPIR programme co-financed by the Participating States and from the European Union’s Horizon 2020 research and innovation programme. Funder name: European Metrology Programme for Innovation and Research (EMPIR); Funder ID: 10.13039/10001413