Data and codes for "Perimeter modes of nanomechanical resonators exhibit quality factors exceeding 10^9 at room temperature"

This work was supported by funding from the Swiss National Science Foundation under grant agreement no. 182103, the EU H2020 research and innovation program under grant agreement no.732894 (HOT) and the European Research Council grant no. 835329 (ExCOM-cCEO). G.H. and N.J.E. acknowledge support from the Swiss National Science Foundation under grant no. 185870 (Ambizione). All samples were fabricated at the Center of MicroNano Technology (CMi) at EPFL.

Data and codes for "Perimeter modes of nanomechanical resonators exhibit quality factors exceeding 109 at room temperature"

Related Organizations

École Polytechnique Fédérale de Lausanne EPFL
Switzerland

Keywords

Data, Ringdown measurements, Fabrication mask

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