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Eigenvector Metal Etch Data Parser - Python

Name: Eigenvector Metal Etch Data Parser - Python
Creator: Gopinadhan, Jaganadh
Keywords: Microfabrication, Semiconductor, Micro-fabrication, Data Science, Data Mining, Micro Nano Fabrication, Wafer Etching

integration_instructionsResearch softwarekeyboard_double_arrow_right Software 29 Jan 2022 English Publisher:Zenodo

Authors: Gopinadhan, Jaganadh;

doi: 10.5281/zenodo.5919197 , 10.5281/zenodo.5919280 , 10.5281/zenodo.5919195

Eigenvector Metal Etch Data Parser - Python

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Abstract

The Eigenvector Etch Data Parser is developed to read Matlab data files published by Eigenvector[1]. The data is from a LAM 9600 Metal Etching Machine and was collected in 1995's. The data is available as three individual .mat files MACHINE_Data.mat, OES_DATA.mat, and RFM_DATA.mat. The parser reads each file and converts the calibration data (sensor data) and test data (sensor data) into a single DataFrame. The parser introduced an additional field in the data 'fault_name', which helps the user identify the normal/calibration wafers and test wafers(with defects). We tested the parser in Python3 environments only; if you are looking for Python2 compatibility, please test and create a bug/pull request as applicable. The source code is released under Apache 2.0 license and is available at https://github.com/jaganadhg/egvsemicon. A detailed note on the data and usage of the parser is available at https://github.com/jaganadhg/egvsemicon/blob/main/EGV_Data_exploreer.ipynb. [1] https://eigenvector.com/resources/data-sets/ [2] https://github.com/jaganadhg/egvsemicon/blob/main/EGV_Data_exploreer.ipynb

Keywords

Microfabrication, Semiconductor, Micro-fabrication, Data Science, Data Mining, Micro Nano Fabrication, Wafer Etching

1 Research products, page 1 of 1

Eigenvector Metal Etch Data Parser
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