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This work was supported by funding from the Swiss National Science Foundation under grant agreement no. 182103, the EU H2020 research and innovation programme under grant agreement no.732894 (HOT) and the European Research Council grant no. 835329 (ExCOM-cCEO). N.J.E. acknowledges support from the Swiss National Science Foundation under grant no. 185870 (Ambizione). This work was further supported by the Defense Advanced Research Projects Agency (DARPA), Defense Sciences Office (DSO) contract no. HR00111810003. All samples were fabricated at the Center of MicroNanoTechnology (CMi) at EPFL.
Data and code for the article "Hierarchical tensile structures with ultralow mechanical dissipation", consisting of all the ringdown measurements, spectra and codes for data analysis and generation of the fabrication GDS masks.
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