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The growth of hBN is explored via CVD on Ni, using a tubular reactor and ammonia borane as precursors. The parameter space was explored and hBN was successfully grown. This deliverable reports the recipe and growth of hBN via CVD, and a complete and extensive characterization with Optical Microscopy (OM), X-Ray Photoelectron Spectroscopy (XPS), Electron Energy Loss Spectra (EELS) and Transmission Electron Microscopy (TEM). Two different 10x10mm2 samples from different areas of a 4’ wafer sample were analysed by OM and XPS, and two other areas where transferred to TEM grids for TEM characterization (4 samples in total with complementary techniques).
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