This data publication contains the results of nanoindentation tests on magnetron-sputtered MoS2 coatings and supplements the publication “Microstructure, mechanical properties and tribological behavior of magnetron-sputtered MoS2 solid lubricant coatings deposited under industrial conditions” doi: 10.3390/coatings10080755. The coatings are described in the zenodo publication “Tribological investigations of PVD-MoS2 coatings on a ball-on-disk tribometer under vacuum conditions” doi: 10.5281/zenodo.4903434. Please refer to their file "All_samples.csv" for the deposition parameters of the different samples. The current publication takes over the sample naming convention. Nanoindentations were performed by S.Krauß under the supervision of B.Merle at the Institute I of the Materials Science and Engineering Department of the Friedrich-Alexander University Erlangen-Nürnberg (Martensstr.5, 91058 Erlangen, Germany) using a G200 nanoindenter (KLA, Milpitas, CA, USA), equipped with a Berkovich diamond indenter tip. 25 nanoindentations were performed on each coating in Continuous Stiffness Measurement mode. The maximum indentation depth was 500 nm . Because of the strongly different coating thicknesses, the indentation hardness and indentation modulus were evaluated in the range 4 - 6 % of the individual coating thickness. The data are provided in 43 .csv files, each corresponding to a single coating. The data in each .csv file are organized as follows: There are 27 rows in each file. Each row contains seven comma separated characters, forming seven columns. The data description is given in row 1, e.g., “Hardness”. The physical unit is given in row 2, e.g., “GPa”. From row 3 to row 27, the individual measurement values are provided for the respective indents. The following information can be found in the respective columns: 1: Test number. 2: Indentation modulus in GPa. 3: Indentation hardness in GPa. 4:Drift correction during experiment in nm/s. 5: Time of the measurement. 6: Tip-calibration-function used for evaluation. 7: Temperature during the measurement in °C.

This research was funded by the German Research Foundation (DFG) Priority Program SPP 2074 "Fluid-free lubrication systems with high mechanical loads", grant number ME 4368/7-1.