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GDS fabrication masks, ringdown traces and compilations of fit results, exemplary Raman scans, results of relevant FEM simulations and some of the scripts used for generating the plots in the manuscript.
MEMS, Mechanical dissipation, Microfabrication, Material science, Nanomechanics, Optomechanics
MEMS, Mechanical dissipation, Microfabrication, Material science, Nanomechanics, Optomechanics
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