Automated Contacting of On-Wafer Devices for RF Testing

descriptionPublicationkeyboard_double_arrow_right Article , Conference object 01 Aug 2020Publisher:IEEEJournal:2020 Conference on Precision Electromagnetic Measurements (CPEM)

Authors: F. Mubarak; C.D. Martino; R. Toskovic; G. Rietveld; M. Spirito;

doi: 10.1109/cpem49742.2020.9191800 , 10.5281/zenodo.4276094 , 10.5281/zenodo.4276095

Automated Contacting of On-Wafer Devices for RF Testing

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Abstract

A method is presented for automated probing of on-wafer devices for measurements at millimetre-wave frequencies. The proposed method automatically detects the contact between the measurement probe and on-wafer device, based on the evaluation of variation in the input reflection coefficient. It is shown that using this automated technique, about five times better measurement repeatability is achieved in millimetre-wave device characterisation.

Related Organizations

Delft University of Technology
Netherlands

Keywords

On-wafer probing, on-wafer contacting, measurement techniques

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