The findability (F), accessibility (A), interoperability (I), and re-usability (R) of research data are essential and acknowledged factors for an efficient re-use of data, e.g. for data driven science. However, in the field of plasma technology there is currently a lack of common standards and tools to publish data according to these FAIR data principles. To address this issue, the present contribution reports on the development of a modular metadata model for the representation of subject- and method-specific metadata in the field of plasma technology, which is based on the core plasma metadata schema, Plasma-MDS (https://arxiv.org/abs/1907.07744). The linking and semantic description of the metadata modules are carried out via ontologies. The developed tools and services are made available via a plasma technology knowledge graph and the data platform https://www.inptdat.de/. They are intended to be reviewed and further developed by the low-temperature plasma community to provide a common basis for open science and research data management according to the FAIR principles.

Funded by the German Federal Ministry of Education and Research (BMBF) under grants 16QK03A, 16QK03B, and 16QK03C.