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A Graph-Based Model of Micro-Transfer Printing for Cost-Optimized Heterogeneous 2.5D Systems

Authors: Fischbach, Robert; Horst, Tilman; Lienig, Jens;

A Graph-Based Model of Micro-Transfer Printing for Cost-Optimized Heterogeneous 2.5D Systems

Abstract

Micro-transfer printing (μTP) is a promising assembly technology that enables heterogeneous integration of dies originating from different wafers. It combines the advantages of pick-and-place in terms of flexibility with the advantages of wafer-level processing in terms of high throughput. μTP applies an elastomer stamp to transfer multiple dies from source to target wafers in parallel. Increasing the stamp size allows for the transfer of more dies at once and reciprocally shortens the manufacturing time, enabling extensive cost reductions. On the other hand, larger stamps result in a lower wafer utilization, thereby causing increases in costs. Finding the cost-optimal stamp layout is one of the key tasks when designing heterogeneous systems for μTP. There is no trivial solution to calculate the wafer utilization needed to evaluate the quality of a stamp layout. Based on a graph problem known as maximum independent set, we propose a model to determine the wafer utilization subject to the stamp and wafer layout. We demonstrate the application of our model within an economic cost function to optimize a μTP design with regard to manufacturing costs.

Keywords

micro-transfer, printing, dies, wafers, high throughput, stamp, cost reduction, heterogeneous systems

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popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
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influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
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impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
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