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pmid: 32680172
handle: 1854/LU-8676628
We demonstrate waveguide-detector coupling through the integration of GaAs p-i-n photodiodes (PDs) on top of silicon nitride grating couplers (GCs) by means of transfer-printing. Both single device and arrayed printing is demonstrated. The photodiodes exhibit dark currents below 20 pA and waveguide-referred responsivities of up to 0.30 A/W at 2V reverse bias, corresponding to an external quantum efficiency of 47% at 860 nm. We have integrated the detectors on top of a 10-channel on-chip arrayed waveguide grating (AWG) spectrometer, made in the commercially available imec BioPIX-300 nm platform.
waveguide-detector, coupling, GaAs, photodiodes, silicon nitride, transfer-printing, spectrometer, BioPIX-300 nm platform, Technology and Engineering, Atomic and Molecular Physics, Optics, III-V
waveguide-detector, coupling, GaAs, photodiodes, silicon nitride, transfer-printing, spectrometer, BioPIX-300 nm platform, Technology and Engineering, Atomic and Molecular Physics, Optics, III-V
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