Data from Electron Backscatter Diffraction analysis for two small silicon maps captured using a Bruker eFlash HR (1st generation) with full pattern resolution on a FEI Quanta instrument. The orientation data can be loaded using MTEX 5.0.3 (http://mtex-toolbox.github.io/). The data is released to facilitate the development of new EBSD analysis methodologies, including AstroEBSD (https://github.com/benjaminbritton/AstroEBSD/) which has been developed by the Experimental Micromechanics Research Group (http://www.expmicromech.com) & the Oxford Micromechanics group (http://users.ox.ac.uk/~ajw/). The data is from a single crystal of semiconductor grade silicon. The wafer is oriented with (001) as the surface plane and <110> approximately aligned along x and y. The x axis points right to left, the y axis points top to bottom, and the z axis is out of the page (as per conventions described in http://dx.doi.org/10.1016/j.matchar.2016.04.008). This data was collected within the Harvey Flower EM Suite within the Department of Materials, Imperial College London. The equipment was funded under the Shell-Imperial Advanced Interfaces in Materials Science University Technology Center. Please contact Dr Ben Britton or Alex Foden if you have any queries or require further information (b.britton@imperial.ac.uk, a.foden16@imperial.ac.uk).