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ZENODO
Software . 2026
License: http://opensource.org/licenses/MIT
Data sources: ZENODO
ZENODO
Software . 2026
License: https://opensource.org/licenses/MIT
Data sources: Datacite
ZENODO
Software . 2026
License: https://opensource.org/licenses/MIT
Data sources: Datacite
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wafer-proc-sim: Data-quality-aware heteroscedastic GP surrogate for 4H-SiC blade dicing

integration_instructionsResearch softwarekeyboard_double_arrow_right Software 07 Jun 2026Publisher:Zenodo
Authors: Nishioka, Keisuke;
Code repository: https://github.com/keisuke58/wafer-proc-sim

doi: 10.5281/zenodo.20495459 , 10.5281/zenodo.20591145

wafer-proc-sim: Data-quality-aware heteroscedastic GP surrogate for 4H-SiC blade dicing

Abstract

Open-source framework for 4H-SiC blade dicing process optimization combining physics-based simulation, heteroscedastic Gaussian process surrogates, Ensemble Kalman Filter state estimation, and Bayesian optimization. Core paper path is reproducible via scripts/reproduce_paper.sh with CI-regression-tested LOO metrics.

Related Organizations
Keywords

semiconductor manufacturing, Ensemble Kalman Filter, silicon carbide, process optimization, wafer dicing, heteroscedastic Gaussian process, surrogate modeling

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
Average