This dataset contains three X-ray Energy Dispersive Spectroscopy (EDS) files in the standard EMSA/MAS format (.txt), recorded on May 5, 2025. The data represents the spectroscopic analysis of Molybdenum (Mo) samples obtained via Scanning Electron Microscopy (SEM). Each file (Spectrum_1_Mo.txt, Spectrum_2_Mo.txt, and Spectrum_3_Mo.txt) records the signal intensity (measured in counts) as a function of X-ray energy (measured in keV). The spectra span an energy range up to ~19.5 keV with a channel calibration of 0.01 keV per channel. Research Purpose & Application: These files are specifically utilized to demonstrate and evaluate the performance of the MSSR (Mean Shift Super-Resolution) algorithm. The dataset serves as a benchmark to test the algorithm's capability to improve spectral resolution and effectively separate overlapping or closely spaced peak profiles of Molybdenum and Sulfur. Key Experimental Parameters: Beam Voltage (Beam KV): 15.0 kV Acquisition Time (Livetime): 240.0 seconds per spectrum Elevation Angle: 29.0° Magnification (MAGCAM): 1000.0x Analyzed Element: Molybdenum (Mo), with characteristic label lines identified at 0.193 keV and 2.293 keV.