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Modeling of evaporation of macroparticles of vacuum arcs by an electron beam

Authors: Litovko, Iryna; Rudolph, Martin; Anders, André; Goncharov, Alexey;

Modeling of evaporation of macroparticles of vacuum arcs by an electron beam

Abstract

The evaporation of droplets in an arc plasma flow under the action of an electron beam injected into the arc plasma and the condition of direct heating of microdroplets by beam electrons are considered. Analytical modeling shows that droplets ≤1 μm in size can be completely evaporated over time scales typical for cathodic arc deposition systems. It is shown that small microdroplets evaporate more intensively. The lower limit working points in terms of plasma electron density, and the electron energy and density of the injected energetic electrons required for droplet evaporation are found.

Keywords

droplets, plasma optics, droplet evaporation, fast electrons, film deposition, vacuum-arc discharge

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
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