This dataset consists of 4-dimensional scanning transmission electron microscopy diffraction data collected on a NION Hermes at 200 keV for two different sputtered films of Pd77.5Cu6.0Si16.5. These two different samples represent two different states, referred to as "more-relaxed"/"slow-quenched" and "less-relaxed"/"fast-quenched" in the paper specified under "related work". This manuscript also contains experimental details. You are welcome to use this dataset in compliance with the CC BY 4.0 licence assigned to this dataset. Any questions regarding the data can be addressed to birte.riechers@bam.de who would also appreciate a note if you find the data useful. ____________________________________________________________________ The data consists of eight sets of npy and .json files with the format "4DSTEM_time-stamp_data-size_sample-state_location_measurement-ID". 1) 4DSTEM_2022-11-07T130135_100x100x250x250_SQ_locA_scan3 2) 4DSTEM_2022-11-07T135323_100x100x250x250_SQ_locA_scan4 3) 4DSTEM_2022-11-07T143308_100x100x250x250_SQ_locB_scan6 4) 4DSTEM_2022-11-07T143831_100x100x250x250_SQ_locB_scan7 5) 4DSTEM_2022-11-08T120241_100x100x250x250_FQ_locC_scan2 6) 4DSTEM_2022-11-08T122548_100x100x250x250_FQ_locC_scan4 7) 4DSTEM_2022-11-08T154953_100x100x250x250_FQ_locD_scan8 8) 4DSTEM_2022-11-08T155726_100x100x250x250_FQ_locD_scan9 npy files contain the measured data, which consists of 100x100 sites on the sample, equally spaced in two dimensions. At each site, a diffraction pattern of 250 x 250 pixels was recorded. json files contain the meta data to the respective data set. Files 1) to 4) correspond to the "more-relaxed"/"slow-quenched" sample. Files 1) and 2) where measured (at two different sites) at location A, files 3) and 4) (at two different sites) at location B, where the distance between locations A and B is much larger than the length scale covered in the contained maps. Files 5) to 8) correspond to the "less-relaxed"/"fast-quenched" sample. Files 5) and 6) where measured (at two different sites) at location C, files 7) and 8) (at two different sites) at location D, where the distance between locations C and D is much larger than the length scale covered in the contained maps.