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Article . 2021
License: CC BY NC
Data sources: Datacite
ZENODO
Article . 2021
License: CC BY NC
Data sources: Datacite
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Design and Analysis of Micro/Nano X-Y Positioning Stages for Evaluation of Stiffness of Suspension Beams

Authors: Jalagam Kiran Kumar; Ganta Suresh; Ganugapenta Ramesh;

Design and Analysis of Micro/Nano X-Y Positioning Stages for Evaluation of Stiffness of Suspension Beams

Abstract

Now a days, in-precision manipulation systems stiffness are plays an important role to predict precise performance of a suspension beam, due to the high precision control of motion the Nano-position are widely used in industrial and research applications which requires super resolution, such as microscopy, nanofabrication, Nano-patterning and interferometer. Finite Element method which helps to determine stiffness of folded suspension beams with present research trends. This work proposes to calculation of stiffness which is an important parameter to analyze performance of suspension beam for large displacements in positioning stages. Also using various governing equations for straight beams in stages are chose and the analysis is carried out the defined value of stress with deformation and comparing with numerical and analytical data.

Related Organizations
Keywords

Micro/Nano x-y Positioning, Interferometer, Suspension beams, Nanofabrication

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
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