This is a repository for the data to accompany the published manuscript "Formation and Oxygen Intercalation of Vitreous 2D Silica Bilayer Films on Ir(111)", available in PCCP DOI: 10.1039/D5CP04298D. ## Project descriptionThe growth of ultrathin 2D silica bilayer films have been reported on several platinum-group metals.Here, we demonstrate the growth of a vitreous 2D silica bilayer film on Ir(111). Oxygen intercalation in the silica-Ir(111) interface is also investigated. ## AcknowledgementsThe work is supported by the Danish National Research Foundation through the Center of Excellence "InterCat" (grant agreement no. DNRF150). We acknowledge beamtime received at ASTRID2 on the AU-Matline beamline under project number ISA-25-1221.We also acknowledge the partial support by VILLUM FONDEN via the Villum Investigator Program (grant number 25931). ## StructureThe data required to recreate each figure presented in the main manuscript and the accompanying supporting information are provided in individual folders. Each folder has its own description of the data it contains. ## License[CC-BY-SA 4.0](https://creativecommons.org/licenses/by-sa/4.0/deed.de)