The Carinthia-S dataset is an enhanced version of the original publicly available Carinthia dataset (refer to the "Additional details" section), augmented with expert-validated binary segmentation masks for each defect image. It contains Scanning Electron Microscope (SEM) images of defects observed on a single production layer of unstructured semiconductor wafers, along with their corresponding segmentation masks. The dataset comprises 4,591 images, each paired with a segmentation mask, unevenly distributed across six defect classes. The dataset's description is available in the 'carinthia-s_dataset.html' file, and the images themselves can be found in the 'data.zip' file.