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Materials Science in Semiconductor Processing
Article . 2023 . Peer-reviewed
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Materials Science in Semiconductor Processing
Article . 2023 . Peer-reviewed
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Claim

Depth-distribution of resistivity within ion-irradiated semiconductor layers revealed by low-kV scanning electron microscopy

descriptionPublicationkeyboard_double_arrow_right Article , Other literature type 01 Oct 2023 Germany English Publisher:Elsevier BVJournal:Materials Science in Semiconductor Processing, volume 165, page 107,640 (issn: 1369-8001, Copyright policy )Funded by:EC | NOMATEN
Authors: Jóźwik, I.; Jagielski, J.; Ciepielewski, P.; Dumiszewska, E.; Piętak-Jurczak, K.; Kamiński, M.; Kentsch, U.;

doi: 10.1016/j.mssp.2023.107640 , 10.5281/zenodo.14804783 , 10.5281/zenodo.14804784

Depth-distribution of resistivity within ion-irradiated semiconductor layers revealed by low-kV scanning electron microscopy

Keywords

Ion damage, Low-kV SEM, AIIIBV

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    popularity
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    influence
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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
Average
Green
hybrid
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