Nanomechanical crystalline AlN resonators with high quality factors for quantum optoelectromechanics
Nanomechanical crystalline AlN resonators with high quality factors for quantum optoelectromechanics
Funding: This work was supported by the Knut and Alice Wallenberg (KAW) Foundation through a Wallenberg Academy Fellowship (W.W.), the KAW project no. 2022.0090, and the Wallenberg Center for Quantum Technology (WACQT, A.C.), the Swedish Research Council (VR projects No. 2019-04946), the QuantERA project C’MON-QSENS!, and Chalmers’ Area of Advance Nano. H.P. acknowledges funding by the European Union under the project MSCA-PF-2022-OCOMM. MOVPE of AlN on Si was performed at Otto-von- Guericke-Univerrsity Magdeburg. The mechanical resonatorswere fabricated in the Myfab Nanofabrication Laboratory at Chalmers and analyzed in the Chalmers Materials Analysis Laboratory.
Data used for figures in "Nanomechanical AlN resonators for room temperature quantum optoelectromechanics" Anastasiia Ciers et.al
applied physics, nanotechnology, sensing, nanomechanics, optomechanics
applied physics, nanotechnology, sensing, nanomechanics, optomechanics
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