The files collect raw data for figures related to publication on porous germanium as a passivating material for germanium surfaces. 3 top raws in each file describe parameter name, units (if applicable) and comments (if applicable), respectively, for each column. NOTE: due to small changes made during manuscript submission the order of images was shifted. Now, Data_Figure2a.csv corresponds to Figure1a in the manuscript, Data_Figure2b.csv - to Figure1b, and so on. The actual figure number in the manuscript, to which the data file correspondes to, is indicated in the brackets near the file name in the desctiption section. Data_Figure2a.csv [Figure1a in the manuscript] has data on effective lifetime as a function of injection level for samples processed in various components and mixtures of MACE solution (information on corresponding solution for each dataset is provided in the comment section). Data_Figure2b.csv [Figure1b in the manuscript] provides stability test results for selected solutions based on the effective lifetimes measured straight after chemical processing (fresh) and the next day after that. The lifetimes were extracted at injection level of 1E14 cm-3. Data_Figure3.csv [Figure2 in the manuscript] has data on surface recombination velocities (S_eff) as a function of injection lifetime for the samples denoted in the comment section of the file. Data_Figure3_inset.csv [Figure2_inset in the manuscript] provides results of stability test for the sample processed in HF:H2O2 aq. The data represents days after processing with corresponding S_eff values. Data_Figure4b.csv [Figure3b in the manuscript] has normalized XPS data (binding energies with corresponding intensities) of Ge 3d region for the samples indicated in the comment section of the file.