
The data set to paper: Coating of self-sensing AFM cantilevers with boron-doped nanocrystalline diamond at low temperatures Štěpán Potocký1*, Jaroslav Kuliče1k, Egor Ukraintsev1, Ondřej Novotný2, Alexander Kromka3, and Bohuslav Rezek1 1 Faculty of Electrical Engineering, Czech Technical University in Prague, Technická 2, 16627 Prague, Czech Republic2 NenoVision s.r.o., Purkyňova 649, 61200 Brno, Czech Republic 3 Institute of Physics, Czech Academy of Sciences, Prague 6, Czech Republic*corresponding author: potocky@fel.cvut.cz Data manager: Kristýna Dostálová: dostalovak@fzu.cz Date of data collection: 1. 10. 2023 - 31. 3. 2024 All the data showed in the pictures are provided in X-Y format with described sample. Always, the respective figure to which the data belong is provided in high resolution. The data are in the following formats: Figure 1: pdfFigure 2: pdfFigure 3: pdf, csvFigure 4: pdf, csv, gwyFigure 5: pdf, gwyFigure S1: pdfFigure S2: pdf The comma separated values file (csv) always contain the description of the columns in the first row. Gwy correspond to free Gwyddion SPM data analysis software (gwyddion.net). In case of composed image the name of the file corresponds to the corresponding figure. Data acquistion and processing is provided in the Experimental part in the publication: DOI:10.1002/pssa.202400553.
boron-doping, nanocrystalline diamond, self-sensing probes, microwave plasma CVD, nanocrystalline diamond, microwave plasma CVD
boron-doping, nanocrystalline diamond, self-sensing probes, microwave plasma CVD, nanocrystalline diamond, microwave plasma CVD
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