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Presentation . 2014
License: CC BY
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Other literature type . 2014
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https://doi.org/10.70675/c8fec...
Doctoral thesis . 2026 . Peer-reviewed
Data sources: Crossref
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Lois de comportement des matériaux utilisés dans les contacts électriques pour application " flip chip "

Authors: David Mercier;

Lois de comportement des matériaux utilisés dans les contacts électriques pour application " flip chip "

Abstract

Dans le cadre de l'intégration « 3D », une technologie d'assemblage par report de puces sur tranche de silicium (« flip chip ») reposant sur un procédé de microinsertion a été développée ces dernières années. Cette technologie est basée principalement sur la mise en contact par thermocompression, de réseaux de (micro)inserts en Nickel ECD, avec des plots de connexions métalliques en Al(Cu). Au cours de ce travail, un scénario de formation du contact entre un unique microinsert de Nickel rugueux et un film mince d'Aluminium lisse, prenant en compte la présence d'Alumine native à l'interface de contact, est proposé pour une gamme de pressions allant du MPa au GPa. L'analyse du contact métal-oxyde-métal se base essentiellement sur la fissuration de l'oxyde natif suivie de l'extrusion du métal au travers des fissures, et nécessite d'établir au préalable les lois de comportement des matériaux mis en jeu à partir d'essais de nanoindentation instrumentée couplés à des simulations numériques. Enfin, la mesure de l'évolution de la résistance électrique de contact en fonction de la force appliquée à l'aide de dispositifs expérimentaux originaux, permet de mettre en évidence les différents mécanismes de formation du contact métallique lors du procédé de microinsertion.

Keywords

Alumine ALD, microinsertion, Alumine native, nanoindentation, fissuration, simulations en éléments finis, films minces, loi de comportement, Nickel ECD, contact électrique, multicouche, Aluminium PVD, poinçon plat, mécanique du contact

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selected citations
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This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
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popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
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