This publication was supported by Contract W31P4Q-16-1-0002 (SCOUT) from the Defense Advanced Research Projects Agency (DARPA), Defense Sciences Office (DSO). This material is based upon work supported by the Air Force Office of Scientific Research, Air Force Material Command, USAF under Award No. FA9550-15-1-0099. H.G. acknowledges support by funding from the European Unions Horizon 2020 research and innovation programme under Marie Sklodowska-Curie IF grant agreement No. 709249. A.B., D.G. and C.S.B. acknowledge support from the European Research Council under grant agreement ERC-2012- StG 306630-MATISSE. All samples were fabricated and grown in the Center of MicroNanoTechnology (CMi) at EPFL.

This dataset contains the data presented in the figures of the article "Mid-infrared frequency comb via coherent dispersive wave generation in silicon nitride nano-photonic waveguides" (doi:10.1038/s41566-018-0144-1). The raw data in figures (curved plots) is packaged as an independent OriginLab project file (.opj). The layout of the design of the silicon nitride nano-photonic waveguide is presented. Fabrication process card (shown as a diagram) is provided as well. The source code for simulations presented in the article is also presented.