Atmospheric observations (mole fractions) of halogenated greenhouse gases (HFC-23 (CHF3), PFC-318 (c-C4F8), HCFC-22 (CHClF2), HCFC-21 (CHCl2F), HFC-4310mee (C5H2F10), HFC-161 (C2H5F)) at the tall tower site at Cabauw, the Netherlands (51.972 °N, 4.927 °E, altitude -0.7 m a.s.l., 207 m a.g.l.), for the duration of a tracer (HFC-161) release experiment (17.06.2022 – 07.08.2022) within an extended (19.11.2021 – 7.8.2022) measurement campaign of halogenated greenhouse gases (>60 substances) at the Cabauw tall tower site. The measurements were conducted using a Medusa pre-concentration unit, coupled to gas chromatography and mass spectrometry (GC-MS), as is used within the global AGAGE network (https://agage.mit.edu/). The HFC-161 tracer was released at 22 km distance from the Cabauw tall tower site, at 4 m a.s.l., 10 m a.g.l, at various flow rates. HFC-161 mole fractions are provided as the measured mole fractions and as the measured mole fractions normalised to the set tracer release flow rates. In addition, a subset of the above-described data is provided. This was used to assess the emissions of the above listed halogenated greenhouse gases from an industrial factory, by reference to the released HFC-161 tracer. The data are related to an article in Nature (https://doi.org/10.1038/s41586-024-07833-y).