During the SI-Hg performance evaluation of elemental mercury gas generators on the market three generators were tested, e.g., PSA 10.536 elemental Hg generator, bell-jar and Tekran Model 3425. Key characteristics were determined e.g.; the stabilisation period, short-term drift, precision, i.e., reproducibility and repeatability of the concentration generated, linearity, bias, sensitivity to sample gas pressure, sensitivity to surrounding temperature and sensitivity to electrical voltage. All three generators could be tested according to the calibration protocol developed within the project. The results obtained with the different gas generator clearly shows the importance of a metrological calibration. All three candidate generators show a different bias for the setpoint compared to the calibrated output. The data obtained during the performance evaluation of the PSA 10.536 elemental Hg generator is published in this repository. The files of the following experiments can be found here: range1 m1 Calibration_PSA_range1_m1_20221130 multi_point_calibration_PSA_range1_m1 range1 m2 Calibration_PSA_range1_m2_20221209 multi_point_calibration_PSA_range1_m2 range1 m3 Calibration_PSA_range1_m3_20221214 multi_point_calibration_PSA_range1_m3 range1 m4 Calibration_PSA_range1_m4_20230915 multi_point_calibration_PSA_range1_m4 range1 m5 Calibration_PSA_range1_m5_20230919 multi_point_calibration_PSA_range1_m5 range2 m1 Calibration_PSA_range2 m1 20221006 multi_point_calibration_PSA_range2_m1 range2 m2 Calibration_PSA_range2 m2 20221011 multi_point_calibration_PSA_range2_m2 range2 m3 Calibration_PSA_range2 m3 20221012 multi_point_calibration_PSA_range2_m3 short-term drift m1 Calibration mercury gas generator range1 short term drift 20221012 deel 1 PSA_short_term_drift_M1 m2 Calibration mercury gas generator range1 short term drift 20221012 deel 2 PSA_short_term_drift_M2 m3 Calibration mercury gas generator range1 short term drift 20221012 deel 3 PSA_short_term_drift_M3 m4 Calibration mercury gas generator range1 short term drift 20221012 deel 4 PSA_short_term_drift_M4 stability Calibration mercury gas generator range2 stability 20220811 Calibration mercury gas generator stability 20221018