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International Journal of Electrical and Computer Engineering (IJECE)
Article . 2026 . Peer-reviewed
License: CC BY SA
Data sources: Crossref
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FinFET technology: a comprehensive review on materials, structures, fabrication, and device performance

Authors: Yead Rahman; Md Faiaz Al Islam; Nafiya Islam; Sunzid Hassan; Sabbir Alom Shuvo; Iftesam Nabi; Jarif Ul Alam;

FinFET technology: a comprehensive review on materials, structures, fabrication, and device performance

Abstract

As semiconductor devices become smaller, FinFETs have replaced traditional planar MOSFETs. Planar devices face issues like weak electrostatic control and high leakage current at small sizes. FinFETs solve these problems with a three-dimensional structure and multigate design. This improves gate control and reduces short-channel effects. This paper explains FinFET design, materials, and fabrication methods. It highlights how fin geometry affects current flow and device performance. Gate-source voltage (VGS) and drain-source voltage (VDS) are important parameters. These control the device operation in the lin-ear, saturation, and pinch-off regions. Performance factors such as on/off current ratio (ION /IOFF), subthreshold swing (SS), and drain-induced barrier lowering (DIBL) show that FinFETs work well for low-power and high-speed uses. Achieving uniform doping below 5 nm remains difficult. Atomic layer deposition (ALD) helps improve doping control. In summary, FinFETs play a key role in modern semiconductor design by improving scalability and efficiency.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
Average
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