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Article . 2017
License: CC BY
Data sources: ZENODO
ECS Journal of Solid State Science and Technology
Article . 2017 . Peer-reviewed
Data sources: Crossref
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Molecular Layer Deposition from Dissolved Precursors

Authors: Johannes Fichtner; Yanlin Wu; Jakob Hitzenberger; Thomas Drewello; Julien Bachmann;

Molecular Layer Deposition from Dissolved Precursors

Abstract

We present a procedure for growing thin films of an organic polyamid material based on a cyclic repetition of two consecutive, complementary, self-limiting surface reactions. The molecular compounds that react with the surface are dissolved in an organic solvent. This new method exemplifies how atomic layer deposition (ALD) and molecular layer deposition (MLD) can benefit from being transferred from the gas phase to the liquid phase, given that a broad variety of advantageous reagents are only available in dissolved form.

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Germany
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Keywords

thin films, DDC Classification::5 Naturwissenschaften und Mathematik :: 54 Chemie :: 540 Chemie und zugeordnete Wissenschaften, atomic layer deposition, molecular layer deposition

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
views
OpenAIRE UsageCountsViews provided by UsageCounts
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14
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5
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