Implementation, Modelling and Verification of High-Speed Mach-Zehnder Phase Modulators in an Open Access InP Foundry Platform

descriptionPublicationkeyboard_double_arrow_right Article 01 Jun 2023Publisher:Institute of Electrical and Electronics Engineers (IEEE)Journal:Journal of Lightwave Technology, volume 41, pages 3,498-3,504 (issn: 0733-8724, eissn: 1558-2213,

Copyright policy )Funded by:EC | POETICS

Authors: Y Durvasa Gupta; Guillaume Binet; Wouter Diels; Oliver Abdeen; Tom Gaertner; Moritz Baier; Martin Schell;

doi: 10.1109/jlt.2023.3244129

Implementation, Modelling and Verification of High-Speed Mach-Zehnder Phase Modulators in an Open Access InP Foundry Platform

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Abstract

We present the introduction of high-speed phase modulators based on the quantum-confined Stark effect to the generic InP foundry platform at Fraunhofer HHI. An overview of the technological integration of the high-speed phase Mach-Zehnder modulators (MZM) to the existing generic foundry process is described. In addition, an electro-optical behavioral model for the high speed MZM, which gives insight into the influence of design parameters on performance, is discussed. The presented MZM structure with a traveling wave electrode length of 5 mm has a Vπ of 1.4 V and a small signal electro-optic 3 dB bandwidth of 32 GHz. Large signal RF operation up to 80 Gbps is demonstrated. To the best of our knowledge, these are the highest-performance MZMs in an InP open access integrated photonics foundry platform.

Keywords

Integrated photonics, Coherent transceiver, Electro-optical waveguides, Modulators, Optical waveguides, Phase modulation, Quantum well devices, Semi-insulating substrate, electro-optic modulation, Indium Phosphide, Optical modulation

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