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https://zenodo.org/record/3079...
Article
License: CC BY
Data sources: UnpayWall
https://doi.org/10.1109/eurosi...
Article . 2018 . Peer-reviewed
Data sources: Crossref
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CMUT with mechanically coupled plate actuators

Authors: Krenkel, Marcel; Kircher, Marco; Kupnik, Mario; Koch, Sandro G.;

CMUT with mechanically coupled plate actuators

Abstract

Ultrasonic transducers are widely used in application fields of non-destructive testing, sensors and medical imaging. Capacitive micromachined ultrasonic transducers (CMUT) build a promising class of miniaturized and high-performance ultrasonic devices, which have been a part of active research for more than 20 years [1]. Currently, CMUTs suffer from limitations regarding their output pressure and addressable frequencies compared to established piezoelectric devices. We present a mechanically coupled micromachined ultrasonic transducer concept. Simulations based on finite element method (FEM) are used to analyze this approach regarding the eigenfrequency of the mechanical structure. In addition an analytical model for rigid coupling of single transducers is deduced. Preliminary test structures prove the concept and show a reduced resonance frequency. As the acoustic wave attenuation significantly decrease with lower frequencies in air, airborne applications benefit from reduced resonance frequencies.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
1
Average
Average
Average