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IEEE Electron Device Letters
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IEEE Electron Device Letters
Article . 1994 . Peer-reviewed
License: IEEE Copyright
Data sources: Crossref
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Performance limiting micropipe defects in silicon carbide wafers

Authors: Neudeck, Philip G.; Anthony Powell, J.; Powell, J. A.;

Performance limiting micropipe defects in silicon carbide wafers

Abstract

Reports on the characteristics of a major defect in mass-produced silicon carbide wafers which severely limits the performance of silicon carbide power devices. Micropipe defects originating in 4H- and 6H-SiC substrates were found to cause pre-avalanche reverse-bias point failures in most epitaxially-grown pn junction devices of 1 mm/sup 2/ or larger in area. Until such defects are significantly reduced from their present density (on the order of 100's of micropipes/cm/sup 2/), silicon carbide power device ratings will be restricted to around several amps or less. >

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This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
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This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
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