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Propagation of a shear-horizontal surface acoustic mode in a periodically grooved AlN/Al2O3 microstructure

Authors: J. Xu; J. S. Thakur; F. Zhong; H. Ying; G. W. Auner;

Propagation of a shear-horizontal surface acoustic mode in a periodically grooved AlN/Al2O3 microstructure

Abstract

We investigate the shear-horizontal surface acoustic waves (SH-SAWs) generated on an AlN/Al2O3 microstructure by laser-micromachined grooves on the AlN film. In the absence of grooves, the AlN/Al2O3 device shows resonance for only a lower velocity SAW mode. However, when grooves of periodicity smaller than half the wavelength of the surface acoustic wave are micromachined, a higher velocity resonance due to a SH-SAW mode is observed in the device. It is found that our SH-SAW mode remains undamped and is able to propagate across the device when loaded with a biofluidic mass. We have also measured the mass sensitivity of the SH-SAW mode under biofludic load in terms of frequency shift. Measurements show that this mode has a very high mass sensitivity of the order 1.35 ng/ml, which suggests that the device can be applied for the detection of a small concentration of antigens in a biofluid. In this article, the fabrication and grooving techniques of the device are also addressed.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
17
Average
Top 10%
Top 10%
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