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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Journal of Microelec...arrow_drop_down
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
Journal of Microelectromechanical Systems
Article . 2009 . Peer-reviewed
License: IEEE Copyright
Data sources: Crossref
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Fiber-Optic Laser Doppler Vibrometer to Dynamically Measure MEMS Actuator With In-Plane Motion

Authors: null Man-Geun Kim; null Kyoungwoo Jo; null Hyuk-Sang Kwon; null Wongun Jang; null Youngsik Park; null Jong-Hyun Lee;

Fiber-Optic Laser Doppler Vibrometer to Dynamically Measure MEMS Actuator With In-Plane Motion

Abstract

An on-axis laser Doppler vibrometer (LDV), where the direction of the incident beam is the same as the direction of the movement of the actuator, intrinsically offers an accurate dynamic measurement, although it cannot be currently applied to MEMS actuators with in-plane motion due to its limited access to the sidewall. The only currently available method is an off-axis LDV, which still shows serious measurement errors, depending on the target surface pattern of the device. In this paper, an on-axis fiber-optic LDV (FLDV) with a 45deg-angled optical fiber is proposed as a means of measuring the in-plane motion of a MEMS actuator. The device demonstrated displacements in the range between 6.5 mum at 2 Hz and 11.0 mum at 280 Hz, corresponding to the minimum and maximum velocities of 81.6 mum/s and 19.3 mm/s, respectively. The measurement capability of the proposed FLDV is then confirmed to cover the movement of most MEMS actuators such that it can greatly enhance the flexibility of dynamic measurements in MEMS actuators.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
13
Top 10%
Top 10%
Average
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