For high numerical aperture (NA) near-field systems using a solid immersion lens, layer stack types of first-surface read-only-memory (ROM) discs have been investigated. Complicated interactions of high-NA incident and diffracted waves with surface waves occur in multilayer-stacked subwavelength structures on the discs. Therefore, vector diffraction simulation in consideration of these effects is indispensable for the optimization of the disc structures. We used rigorous coupled wave analysis to numerically calculate readout signals from the discs. On the basis of the simulation results, we actually fabricated high-density ROM media. Consequently, a significantly low jitter of 6.8% was obtained for 100 Gbyte ROM media with a designed structure in an NA 2.0 system.