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VEHICLE ANAGEMENT OF AMHS IN 300MM WAFER FAB

Authors: James T. Lin; Chun-Kuan Wu; Ching-Ju Yang;

VEHICLE ANAGEMENT OF AMHS IN 300MM WAFER FAB

Abstract

ABSTRACT In this paper, a vehicle management framework for connecting transport of automated material handling system (AMHS) in 300mm wafer fab, which integrates the interbay and intrabay systems, is proposed. Based on operational area of vehicles, we extend our previous study and propose “vehicle type” concept for vehicle management in the AMHS. Three types of vehicle management scheme are analysed and discussed, in order to assign vehicles flexibly and improve performance of transport environment. These include 1) fixed vehicle type, 2) virtual vehicle type, and 3) dynamic vehicle type.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
3
Average
Average
Average
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