The Automated Materials Handling System (AMHS) in the semiconductor industry plays a vital role in reducing wafer cycle times and enhancing fabrication facility (fab) productivity. Due to the complexity of the manufacturing process and the stochasticity introduced by the inherent variability of processing times, the vehicle allocation for the AMHS is a challenging task, especially in 300 mm wafer fabs where the AMHS comprises both the interbay and intrabay systems to perform the timely deliveries. This paper studied the vehicle allocation problem in a typical 300 mm wafer fab. We formulated it as a simulation optimisation problem and proposed a conceptual framework to handle the problem. A discrete event simulation model was developed to characterise the AMHS, and the technique of simulation optimisation was applied to obtain the optimal vehicle allocation for both the interbay and intrabay systems. To demonstrate the feasibility and advantages of the simulation optimisation approach, a photobay example w...