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Design, Simulation and Fabrication of A Novel MEMS Based Pulsometer

Authors: Xingzhe Zhang; Arnesh Bose; Dinesh Maddipatla; Binu Narakathu; Vikram Turkani; Massood Atashbar;

Design, Simulation and Fabrication of A Novel MEMS Based Pulsometer

Abstract

A novel pulsometer was successfully developed using microelectromechanical systems (MEMS) based silicon-on-glass (SOG) technology for biomedical applications. The sensor was modelled and simulated in COMSOL Multiphysics® for pressures ranging from 0 to 40 mmHg. The capability of the fabricated pulsometer to detect movements in x and z-axis directions was investigated. The simulation results demonstrated displacement changes as high as of 98% and 36% in the x and z-axis directions, respectively for 40 mmHg, which correspond to typical radial blood pressure (rBP) on the wrist. In addition, an average capacitance change of 1 nF was experimentally obtained in the x-axis direction, from −5 V to 5 V. The response of the pulsometer is analyzed and presented in this paper.

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Keywords

A, capacitive sensor, pulsometer, microelectromechanical systems (MEMS), silicon-on-glass (SOG), COMSOL simulation, General Works

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
19
Top 10%
Top 10%
Top 10%
gold