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Material handling automation for wafer fabrication facilities

Authors: D. Pillai;

Material handling automation for wafer fabrication facilities

Abstract

A detailed analysis of the needs and requirements for successfully designing and implementing automated material handling and control systems in wafer fabs is presented. In addition, potential system configurations and options for both interbay and intrabay material handling designs are discussed. The control system requirements, the importance of total systems integration, and the role of the skilled production operator are addressed. Constant references are made to material movement dynamics-a critical factor that affects the performance and acceptance of the system. >

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    Average
    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
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    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
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Powered by OpenAIRE graph
Found an issue? Give us feedback
selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
12
Average
Top 1%
Top 10%
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