
A detailed analysis of the needs and requirements for successfully designing and implementing automated material handling and control systems in wafer fabs is presented. In addition, potential system configurations and options for both interbay and intrabay material handling designs are discussed. The control system requirements, the importance of total systems integration, and the role of the skilled production operator are addressed. Constant references are made to material movement dynamics-a critical factor that affects the performance and acceptance of the system. >
| selected citations These citations are derived from selected sources. This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | 12 | |
| popularity This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network. | Average | |
| influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | Top 1% | |
| impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network. | Top 10% |
