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Low Temperature Curable Polyimide Film Properties and WLP Reliability Performance with Various Curing Conditions

Authors: Yu Chuan Chen; Katch Wan; Chen An Chang; Rick Lee;

Low Temperature Curable Polyimide Film Properties and WLP Reliability Performance with Various Curing Conditions

Abstract

Polyimide (PI) is a curable polymeric dielectric, which is a popular material for wafer level packages (WLP). Low-curable-temperature polyimide (LTP) attracts increasing interest in assembly applications and is one of the critical materials for 2.5D IC and fan-out (FO) applications because of its curing temperature constraint during the packaging process. As the possible curing temperature is approached, the curing level percentage is an important index of the polymer film. Herein, we aimed to study the thermal properties of PI under various curing conditions (curing level 30–100%) and choose the curing conditions (curing level 80–100%) to apply on WLP for component-level reliability (CLR), chemical resistance and board-level reliability (BLR) tests. According to the CLR results, the lower curing level (about 80%) passes scanning acoustic tomography (SAT) inspection for the 1000-h temperature humidity test (THT), the 96-h u-bias highly accelerated stress test (uHAST), and the 1000-h high-temperature storage test (HTST) despite its lesser thermal stability and chemical resistance than the fully cured condition. In the BLR test, ball drop test results show no gap between the 80% and 100% curing level conditions. In the thermal cycle test (TCT) the lower curing level gives a better TCT result. Finally, since reliability issues minimize chemical resistance capability and thermal process reduction, curing level criteria might be redefined in the polyimide curing process.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
3
Average
Average
Average
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