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Eigenvector Metal Etch Data Parser

Name: Eigenvector Metal Etch Data Parser
Creator: Jaganadh Gopinadhan
Keywords: Microfabrication, Semiconductor, Micro-fabrication, Data Science, Data Mining, Micro Nano Fabrication, Wafer Etching

integration_instructionsResearch softwarekeyboard_double_arrow_right Software 29 Jan 2022 English Publisher:Zenodo

Authors: Jaganadh Gopinadhan;

doi: 10.5281/zenodo.5919196

Eigenvector Metal Etch Data Parser

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Abstract

The Eigenvector Etch Data Parse is developed to read Matlab data files. The parse reads each file and converts the calibration data (sensor data) and test data (sensor data) into a single DataFrame. The parse introduced an additional field in the data 'fault_name', which helps the user identify the normal/calibration wafers and test wafers(with defects). We tested the parser in Python3 environments only; if you are looking for Python2 compatibility, please test and create a bug/pull request as applicable. The source code is released under Apache 2.0 license and is available at https://github.com/jaganadhg/egvsemicon.

Keywords

Microfabrication, Semiconductor, Micro-fabrication, Data Science, Data Mining, Micro Nano Fabrication, Wafer Etching

1 Research products, page 1 of 1

Eigenvector Metal Etch Data Parser - Python
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Eigenvector Metal Etch Data Parser

Eigenvector Metal Etch Data Parser

1 Research products, page 1 of 1

Eigenvector Metal Etch Data Parser - Python