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Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Authors: Koybasi, Ozhan; Zhang, Jiaguo; Kok, Angela; Summanwar, Anand; Povoli, Marco; Breivik, Lars; Bergamaschi, Anna; +1 Authors

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Abstract

Silicon radiation detectors with minimum dead area in the sensor periphery are desirable and sometimes necessary for many applications in nuclear medicine, high energy physics, and X-ray science. The dead area typically includes a guard ring structure that is required for facilitating a uniform electric field distribution around the active area of the sensor, and consequently assuring high breakdown voltages, as well as for limiting the active area leakage current. The dead sensor periphery can be drastically reduced or even completely eliminated by replacing the conventional guard ring structure with the so-called ”active-edge”. The active edge is fabricated by etching through-substrate trenches surrounding the active area of the sensor using a micromachining technique known as deep reactive ion etching, followed by passivation of trench walls with doping. The active edge thus provides an excellent isolation of the active area from defects resulting from sensor separation while occupying only negligible physical space. Several laboratories worldwide have investigated the fabrication of active-edge sensors using a support wafer, which is required to provide mechanical integrity once the trenches are etched. However, the post-processing removal of the support wafer is a cumbersome and unreliable step, making this fabrication approach unsuitable for high yield manufacturing. We have recently developed a new fabrication method that eliminates the challenges associated with processing on a support wafer and thus facilitates mass-manufacturing. We have successfully demonstrated the fabrication of edgeless sensors with edge insensitivity of < 10 micrometer at SINTEF without the need for a support wafer. The design, fabrication, simulation and characterization results of these sensors are reported in this paper.

Country
Switzerland
Related Organizations
Keywords

silicon radiation detectors, active edge, particle tracking detectors, edgeless sensor, X-ray detectors

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
Average