To investigate the sensing volume of open-ended coaxial probe technique for measurement of dielectric characteristics.A measurement model combining macro- measurement device with a layer model of dielectric properties parameters was established for evaluating the sensing volume of open-ended coaxial probe technique. We defined sensing depth and sensing diameter to describe the distance that could be detected in vertical and horizontal direction. Using a variety of materials with different dielectric properties (Teflon, deionized water, ethanol, and gradient concentration sodium chloride solution), a layered model of dielectric properties differentiation was established. The total combined uncertainties (TCU) were calculated for different output power, and the output power was controlled to increase from -50 dBm to 15 dBm to calibrate the error range of the dielectric properties measurement system. The optimal output power range was determined based on the results of TCU test. In sensing volume measurement experiment, we set the control groups based on measurement parameters that potentially affect the sensing volume including output power (-10, -5, 0, 3, 6, and 9 dBm), frequency (1-500 MHz), Teflon, deionized water, and ethanol to form a dielectric constant difference between high and low contrast groups. Different concentrations of sodium chloride solution and Teflon were used to generate a conductivity difference between high and low contrast groups. These groups were tested in the sensing depth and sensing diameter measurement experiments.The result of TCU test indicated that accurate and stable measurement results could be obtained when the output power was greater or equal to-10 dBm (TCU < 2%). Sensing volume measurement experiment revealed a positive correlation between the sensing depth and output power (P < 0.05). As the measured power increased, the sensing depth gradually increased in deionized water and ethanol, and the difference reached 70 μm. The sensing depth was negatively correlated frequency (P < 0.05). As the concentration of sodium chloride solution increased, the corresponding sensing depth gradually decreased, with a difference reaching 270 μm. The sensing depth of high dielectric materials was greater than that pf low dielectric materials. The results of sensing diameter measurement were not obviously affected by the measurement parameters, and the sensing diameter was stable in a fixed range (1.0 to 1.8 mm) between the diameter of the inner conductor and the diameter of the insulation layer, and was less than the diameter of the probe.The sensing volume of open-ended coaxial probe technique is affected by measurement parameters and dielectric properties of materials, which significantly affect the sensing depth.