
handle: 2268/30319
This paper is dedicated to the physical understanding of electrostatic forces with a one-dimensional reference problem. First a non-dimensional analysis prescribes the kind of assumptions to consider for the electric field model. An analytical study of electro-mechanical coupling is then performed to understand the type of non-linearity added by electrostatic forces, and static and dynamic analysis are used to define new characteristic parameters. To come closer to more realistic problems, cubic mechanical stiffness is added to account for the large displacement hypothesis prescribed for certain types of MEMS and damping effects are studied.
MEMS, Ingénierie mécanique, Electromechanical coupling, Mechanical engineering, Engineering, computing & technology, Ingénierie, informatique & technologie
MEMS, Ingénierie mécanique, Electromechanical coupling, Mechanical engineering, Engineering, computing & technology, Ingénierie, informatique & technologie
| selected citations These citations are derived from selected sources. This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | 0 | |
| popularity This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network. | Average | |
| influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | Average | |
| impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network. | Average |
