Millora de la resposta electro-mecànica per a ressonadors d'alta freqüència basats en MEMS
Millora de la resposta electro-mecànica per a ressonadors d'alta freqüència basats en MEMS
Report for the scientific sojourn at the Department of Micro and Nanotechnology of the Technical University of Denmark from August until December 2006. The research was focused on designing and carrying out a technological process for fabricating high frequency resonators with dielectric solid transducer gaps. Projecte de recerca elaborat a partir d’una estada al Department of Micro and Nanotechnology de la Technical University of Denmark entre agost i desembre del 2006. La finalitat ha estat la fabricació de dispositius MEMS resonants, utilitzant materials dialèctics per a la transducciò capacitiva.
621.3 - Enginyeria elèctrica. Electrotècnia. Telecomunicacions, Sistemes microelectromecànics, Ressonadors
621.3 - Enginyeria elèctrica. Electrotècnia. Telecomunicacions, Sistemes microelectromecànics, Ressonadors
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