Experimental characterization of capacitive micromachined ultrasonic transducers
Experimental characterization of capacitive micromachined ultrasonic transducers
In this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micromachining process. A testing procedure has been established in order to measure the absolute transmit and receive sensitivity spectra of the fabricated devices. The experiments are performed in oil. Pulse-echo experiments are performed and the results are compared to the pitch-catch measurements using calibrated transducers.
Conference Name: Ultrasonics Symposium, IEEE 2007
Date of Conference: 28-31 October 2007
- Bilkent University Turkey
Ultrasonic measurement, Experimental characterization, Testing procedures, Electroacoustic transducers, Transducers, Ultrasonic transducers, Optical design, Flow of fluids, Micromachining, Ultrasonic waves, Surface micromachining processes, cMUT, Fabricated devices, Pitch-catch, Pulse echoes, Capacitive micromachined ultrasonic transducers, Ultrasonics, Experiments, Ultrasonic equipment
Ultrasonic measurement, Experimental characterization, Testing procedures, Electroacoustic transducers, Transducers, Ultrasonic transducers, Optical design, Flow of fluids, Micromachining, Ultrasonic waves, Surface micromachining processes, cMUT, Fabricated devices, Pitch-catch, Pulse echoes, Capacitive micromachined ultrasonic transducers, Ultrasonics, Experiments, Ultrasonic equipment
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